Amorphous Waveguides for High Index Photonic Circuitry

T. Lipka; A. Harke; O. Horn; J. Amthor; J. Müller

doi:10.1364/OFC.2009.OMJ2

Optical Fiber Communication Conference and National Fiber Optic Engineers Conference
OSA Technical Digest (CD) (Optica Publishing Group, 2009),
paper OMJ2
•https://doi.org/10.1364/OFC.2009.OMJ2

Amorphous Waveguides for High Index Photonic Circuitry

T. Lipka, A. Harke, O. Horn, J. Amthor, and J. Müller

Optical Fiber Communication Conference 2009

San Diego, California United States
22–26 March 2009
ISBN: 978-1-55752-865-0

From the session
Silicon Photonics (OMJ)

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T. Lipka, A. Harke, O. Horn, J. Amthor, and J. Müller, "Amorphous Waveguides for High Index Photonic Circuitry," in Optical Fiber Communication Conference and National Fiber Optic Engineers Conference, OSA Technical Digest (CD) (Optica Publishing Group, 2009), paper OMJ2.

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Abstract

Photonic wires, channel and rib waveguides as well as tapers were fabricated with amorphous silicon showing low propagation loss. Material analysis and RTA was carried out in order to tune the refractive index post deposition.

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