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  • Optical Fiber Communication Conference and National Fiber Optic Engineers Conference
  • OSA Technical Digest (CD) (Optica Publishing Group, 2009),
  • paper OMR4
  • https://doi.org/10.1364/OFC.2009.OMR4

CMOS-Integrated 40GHz Germanium Waveguide Photodetector for On-chip Optical Interconnects

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Compact (0.7μmx20μm) germanium waveguide photodetector operating at 40Gbps is demonstrated. Monolithic integration of high-quality Ge-on-insulator single-crystalline layer into the CMOS stack was achieved by lateral seeded crystallization during CMOS wells activation anneal above germanium melting temperature.

© 2009 Optical Society of America

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