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Silicon Waveguide Coupled Resonator Infrared Detector

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Abstract

We present a silicon photodiode implemented in a waveguide coupled ring resonator structure. Infrared detection was achieved by Si+ ion implantation. A15µm-radius ring-based detector demonstrated an equivalent responsivity to a 3mm straight waveguide device.

© 2010 IEEE Communications Society, IEEE Photonics Society, OSA, Telcordia

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