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Demonstration of a Self Aligned Hybrid Silicon-Plasmonic Waveguide with Low Loss and Nanoscale Confinement

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We demonstrate self-aligned approach for fabricating hybrid silicon plasmonic waveguide. The demonstrated structure provides nanoscale confinement together with propagation length of 100 microns on chip. Near-field measurements of propagation and coupling loss are presented.

© 2012 Optical Society of America

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