Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group
  • Optical Fiber Communication Conference/National Fiber Optic Engineers Conference 2013
  • OSA Technical Digest (online) (Optica Publishing Group, 2013),
  • paper OTu2C.4
  • https://doi.org/10.1364/OFC.2013.OTu2C.4

Integration of Silicon Photonics into DRAM Process

Not Accessible

Your library or personal account may give you access


We present an electro-photonic circuit integrated into a 65-nm DRAM periphery process. Its photonic circuit features 2-dB/mm waveguide, 7-dB grating coupler, 10-Gb/s modulator, and 5-Gb/s Ge photodiode.

© 2013 Optical Society of America

PDF Article
More Like This
Optical Interface Platform for DRAM Integration

Ho-Chul Ji, K. H. Ha, I. S. Joe, S. G. Kim, K. W. Na, D. J. Shin, S. D. Suh, Y. D. Park, and C. H. Chung
OThV4 Optical Fiber Communication Conference (OFC) 2011

Photonic Integration in State-of-the-Art Silicon Electronics Processes

Jason S. Orcutt
IM4A.2 Integrated Photonics Research, Silicon and Nanophotonics (IPRSN) 2012

Heterogeneous Integration on Silicon Photonics

Alexander W. Fang, Brian R. Koch, Jae Shin, Erik J. Norberg, Eric Hall, and Gregory Fish
TuN3_1 Conference on Lasers and Electro-Optics/Pacific Rim (CLEOPR) 2013


You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
Login to access Optica Member Subscription

Select as filters

Select Topics Cancel
© Copyright 2022 | Optica Publishing Group. All Rights Reserved