Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group
Conferences > OFC > 2013 > OTu2C > OTu2C.4
  • Optical Fiber Communication Conference/National Fiber Optic Engineers Conference 2013
  • OSA Technical Digest (online) (Optica Publishing Group, 2013),
  • paper OTu2C.4
  • •https://doi.org/10.1364/OFC.2013.OTu2C.4

Integration of Silicon Photonics into DRAM Process

D. J. Shin, K. S. Cho, H. -C. Ji, B. S. Lee, S. G. Kim, J. K. Bok, S. H. Choi, Y. H. Shin, J. H. Kim, S. Y. Lee, K. Y. Cho, B. J. Kuh, J. H. Shin, J. S. Lim, J. M. Kim, H. M. Choi, K. H. Ha, Y. D. Park, and C. H. Chung

Not Accessible

Your library or personal account may give you access

Abstract

We present an electro-photonic circuit integrated into a 65-nm DRAM periphery process. Its photonic circuit features 2-dB/mm waveguide, 7-dB grating coupler, 10-Gb/s modulator, and 5-Gb/s Ge photodiode.

© 2013 Optical Society of America

PDF Article
More Like This
Optical Interface Platform for DRAM Integration

Ho-Chul Ji, K. H. Ha, I. S. Joe, S. G. Kim, K. W. Na, D. J. Shin, S. D. Suh, Y. D. Park, and C. H. Chung
OThV4 Optical Fiber Communication Conference (OFC) 2011

Photonic Integration in State-of-the-Art Silicon Electronics Processes

Jason S. Orcutt
IM4A.2 Integrated Photonics Research, Silicon and Nanophotonics (IPR) 2012

Heterogeneous Integration on Silicon Photonics

Alexander W. Fang, Brian R. Koch, Jae Shin, Erik J. Norberg, Eric Hall, and Gregory Fish
TuN3_1 Conference on Lasers and Electro-Optics/Pacific Rim (CLEO/PR) 2013

View More...
Select as filters
Select Topics Cancel
Top
       
© Copyright 2024 | Optica Publishing Group. All rights reserved, including rights for text and data mining and training of artificial technologies or similar technologies.
Privacy | Terms of Use