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Optica Publishing Group
  • Optical Fiber Communication Conference/National Fiber Optic Engineers Conference 2013
  • OSA Technical Digest (online) (Optica Publishing Group, 2013),
  • paper OTu2C.4
  • https://doi.org/10.1364/OFC.2013.OTu2C.4

Integration of Silicon Photonics into DRAM Process

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Abstract

We present an electro-photonic circuit integrated into a 65-nm DRAM periphery process. Its photonic circuit features 2-dB/mm waveguide, 7-dB grating coupler, 10-Gb/s modulator, and 5-Gb/s Ge photodiode.

© 2013 Optical Society of America

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