Abstract

We demonstrate the first silicon-based parallel-fed travelling-wave photodetector array (TWPDA). Impedance-matched travelling-wave electrode is designed considering periodic loading effect. The demonstrated up to 4-channel TWPDAs show >10GHz 3-dB bandwidths and ~0.75A/W responsivity using 30µm-length PDs.

© 2014 Optical Society of America

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