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Conferences > OFC > 2014 > Th1A > Th1A.2

Integrated single and multi-layer Si3N4 platform for ultra-low loss propagation and small bending radii

Daryl T. Spencer, Martijn J. R. Heck, Renan Moreira, Jock Bovington, John E. Bowers, Arne Leinse, H.H. Van den Vlekkert, Rene G. Heideman, Marcel Hoekman, and Theo T. Veenstra

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Abstract

A combination of low loss and small bend radius Si3N4 waveguide regions are integrated with one etch step. Propagation losses of 1.5 dB/m and 7 dB/m are measured with a transition loss of ≤0.5 dB/taper.

© 2014 Optical Society of America

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