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Complete Si-Photonics Device-library on 300mm wafers

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Abstract

We report performances of active and passive devices in a Silicon-Photonic library on a 300mm-CMOS-platform, showing highly uniform behavior of passive WDM devices, Mach-Zehnder modulators and germanium photo-detectors with state of the art performances.

© 2014 Optical Society of America

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Poster Presentation

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