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Highly uniform and low-loss passive silicon photonics devices using a 300mm CMOS platform

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Abstract

Using an advanced 300mm CMOS-platform, we report record-low and highly-uniform propagation loss: 0.45±0.12dB/cm for wires, and 2dB/cm for slot waveguides. For WDM devices, we demonstrate channel variation(3-σ) within-wafer and within-device of 6.1nm and 1.2nm respectively.

© 2014 Optical Society of America

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