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Conferences > OFC > 2014 > Th2A > Th2A.51

Path to Silicon Photonics Commercialization: 25 Gb/s Platform Development in a CMOS Manufacturing Foundry Line

Andy Eu-Jin Lim, Tsung-Yang Liow, Junfeng Song, Chao Li, Qing Fang, Xiaoguang Tu, Ning Duan, Kok Kiong Chen, Roger Poh Cher Tern, Chuan Peng, Bong Woong Mun, Mohd Nurul Islam, Jae Soo Park, Chivukula Subbu, and Guo-Qiang Lo

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Abstract

Silicon photonics platform in a commercial 0.18 μm CMOS foundry line is described. Low-loss Si passives and high speed germanium photodetectors (>20GHz) with low dark current (~11nA) and high responsivity (1.06A/W) at 1550nm are presented.

© 2014 Optical Society of America

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