Abstract

Thermally tunable microring resonators based on Cu-dielectric-Si hybrid plasmonic waveguide are fabricated on a SOI platform using standard CMOS technology, which have radius of 2.5–3 μm and Q-value of ~166. By placing the TiN heater above the Cu cap over a thin SiN layer, the thermo-optic (TO) devices offer high tuning efficiency of ~1.1 nm/mW and fast tuning speed of ~17.2 μs as compared with the conventional Si ring resonator based TO devices.

© 2014 Optical Society of America