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Conferences > OFC > 2016 > Tu3E > Tu3E.1

Post-fabrication Trimming of Silicon Photonic Circuits by Femtosecond Laser Pulses

Daniel Bachman, Zhijiang Chen, Ying Y. Tsui, Robert Fedosejevs, and Vien Van

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Abstract

Single femtosecond laser pulses are used to permanently change the effective index of silicon waveguides. The mechanism provides a fast, robust technique for post-fabrication tuning of silicon photonic circuits at the wafer level.

© 2016 Optical Society of America

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