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Compact grating coupler for thick silicon nitride

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Abstract

Thick Silicon nitride-on-insolater (SNOI) is widely used for nonlinear applications due to its broadband nearly-zero flattened dispersion. In this paper, we present a grating coupler for strip waveguides on 700-nm-thick SNOI. Focusing grating structure and inverse taper are combined to minify the footprint to 70.2μm × 19.7μm. The peak coupling efficiency is -3.7dB and the 1-dB bandwidth is 54nm.

© 2016 Optical Society of America

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