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Low-loss submicron Ta2O5 optical waveguide and nonlinear optical application

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Abstract

The low-loss and CMOS compatible Ta2O5 based optical waveguide has been demonstrated. The quality factor of 50,000 in the Ta2O5 micro-ring resonator is fabricated. Moreover, the four-wave-mixing has been realized in the submicron Ta2O5 channel waveguide.

© 2016 Optical Society of America

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