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Monolithic Integration of InGaAsP MZI Modulator and InGaAs Driver MOSFET using III-V CMOS Photonics

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Abstract

We monolithically integrated carrier-injection InGaAsP optical modulator and InGaAs MOSFET on III-V-on-insulator wafer. InGaAsP modulator was successfully driven directly by InGaAs driver MOSFET, exhibiting a proof-of-concept of electronic-photonic integration capability of III-V CMOS photonics platform.

© 2017 Optical Society of America

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