Silicon Photonic MEMS: Exploiting Mechanics at the Nanoscale to Enhance Photonic Integrated Circuits

Niels Quack; Hamed Sattari; Alain Y. Takabayashi; Yu Zhang; Pierre Edinger; Carlos Errando- Herranz; Kristinn B. Gylfason; Xiaojing Wang; Frank Niklaus; Moises A. Jezzini; How Yuan Hwang; Peter O’Brien; Marco A. G. Porcel; Cristina Lerma Arce; Saurav Kumar; Banafsheh Abasahl; Peter Verheyen; Wim Bogaerts

doi:10.1364/OFC.2019.M2D.3

Optical Fiber Communication Conference (OFC) 2019
OSA Technical Digest (Optica Publishing Group, 2019),
paper M2D.3
•https://doi.org/10.1364/OFC.2019.M2D.3

Silicon Photonic MEMS: Exploiting Mechanics at the Nanoscale to Enhance Photonic Integrated Circuits

Niels Quack, Hamed Sattari, Alain Y. Takabayashi, Yu Zhang, Pierre Edinger, Carlos Errando- Herranz, Kristinn B. Gylfason, Xiaojing Wang, Frank Niklaus, Moises A. Jezzini, How Yuan Hwang, Peter O’Brien, Marco A. G. Porcel, Cristina Lerma Arce, Saurav Kumar, Banafsheh Abasahl, Peter Verheyen, and Wim Bogaerts

Optical Fiber Communication Conference 2019

San Diego, California United States
3–7 March 2019
ISBN: 978-1-943580-53-8

From the session
Symposia: Future Photonics Devices and Materials for Optical Communications 2 (M2D)

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N. Quack, H. Sattari, A. Y. Takabayashi, Y. Zhang, P. Edinger, C. E. Herranz, K. B. Gylfason, X. Wang, F. Niklaus, M. A. Jezzini, H. Y. Hwang, P. O’Brien, M. A. G. Porcel, C. L. Arce, S. Kumar, B. Abasahl, P. Verheyen, and W. Bogaerts, "Silicon Photonic MEMS: Exploiting Mechanics at the Nanoscale to Enhance Photonic Integrated Circuits," in Optical Fiber Communication Conference (OFC) 2019, OSA Technical Digest (Optica Publishing Group, 2019), paper M2D.3.

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Abstract

With the maturing and the increasing complexity of Silicon Photonics technology, novel avenues are pursued to reduce power consumption and to provide enhanced functionality: exploiting mechanical movement in advanced Silicon Photonic Integrated Circuits provides a promising path to access a strong modulation of the effective index and to low power consumption by employing mechanically stable and thus non-volatile states. In this paper, we will discuss recent achievements in the development of MEMS enabled systems in Silicon Photonics and outline the roadmap towards reconfigurable general Photonic Integrated Circuits.

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