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240×240 Wafer-Scale Silicon Photonic Switches

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Abstract

We report on 240x240 silicon photonic MEMS switches on 4cm x 4cm dies realized by wafer-scale integration and reticle stitching. The maximum on-chip loss is measured to be 9.8dB and the crosstalk is below -70dB.

© 2019 The Author(s)

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