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Demonstration of Ge/Si Avalanche Photodetector Arrays for Lidar Application

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Abstract

We report Ge-on-Si APD arrays with up to 10-by-10 pixels at 1550nm. Our demonstration reveals highly uniform responsivity of ~3.3 A/W with <7% variation. The bandwidth is 9GHz and 0.7GHz for single and 10×10 array.

© 2019 The Author(s)

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