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Large-scale Silicon Photonics Focal Plane Switch Array for Optical Beam Steering

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Abstract

We report on 128×128-element two-dimensional silicon photonics focal plane switch arrays with microelectromechanical-system optical switches for random-access optical beam steering. A 70°×70° field-of-view and sub-MHz steering speed are experimentally demonstrated.

© 2021 The Author(s)

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