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Conferences > OFC > 2021 > M3A > M3A.1

Edge-Coupled Active and Passive Wafer-Scale Measurements on 300mm Silicon Photonics Wafers

Kenneth M. Jabon, Christopher V. Poulton, Ren-Jye Shiue, Matthew J. Byrd, Zhan Su, Mohammad H. Teimourpour, Scott Breitenstein, Ronald P. Millman, Dogan Atlas, Michael R. Watts, and Erman Timurdogan

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Abstract

We perform wafer-scale measurements of silicon photonics components using broadband (100nm+) edge couplers and reflecting optical fiber probes for the first time. We demonstrate <1dB/cm waveguide loss and 25GHz+ micro-ring modulators on 300mm wafers.

© 2021 The Author(s)

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