Sensitivity improvement for silicon MS-SW BG sensors by waveguide height increase or by waveguide suspension with supporting shape modification

Siim Heinsalu; Anna Kawano; Yuji Isogai; Yuichi Matsushima; Hiroshi Ishikawa; Katsuyuki Utaka

doi:10.1364/OFC.2021.Tu6C.6

Optical Fiber Communication Conference (OFC) 2021
OSA Technical Digest (Optica Publishing Group, 2021),
paper Tu6C.6
•https://doi.org/10.1364/OFC.2021.Tu6C.6

Sensitivity improvement for silicon MS-SW BG sensors by waveguide height increase or by waveguide suspension with supporting shape modification

Siim Heinsalu, Anna Kawano, Yuji Isogai, Yuichi Matsushima, Hiroshi Ishikawa, and Katsuyuki Utaka

Optical Fiber Communication Conference 2021

Washington, DC United States
6–11 June 2021
ISBN: 978-1-943580-86-6

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Novel Sensors and Applications (Tu6C)

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S. Heinsalu, A. Kawano, Y. Isogai, Y. Matsushima, H. Ishikawa, and K. Utaka, "Sensitivity improvement for silicon MS-SW BG sensors by waveguide height increase or by waveguide suspension with supporting shape modification," in Optical Fiber Communication Conference (OFC) 2021, P. Dong, J. Kani, C. Xie, R. Casellas, C. Cole, and M. Li, eds., OSA Technical Digest (Optica Publishing Group, 2021), paper Tu6C.6.

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Abstract

Two methods for refractive index sensitivity improvement of silicon SW-MS BG refractive index sensors were considered. Height parameter was optimized and suspended waveguides were introduced. Experimentally obtained values were 850 nm/RIU and 1100 nm/RIU, respectively.

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