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Conferences > OFC > 2021 > W6A > W6A.29

Non-Volatile Operation of a Si PN Ring Resonator with a Ferroelectric Capacitor

Seung-Min Han, Dae-Won Rho, Dae-Hwan Ahn, Jin-Dong Song, Woo-Young Choi, and Jae-Hoon Han

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Abstract

We demonstrated the non-volatile operation of a Si PN ring resonator with a ferroelectric HfZrO2 capacitor. Due to the polarization in the HfZrO2 capacitor, the resonance wavelength of the ring resonator shows the bi-stable operation.

© 2021 The Author(s)

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