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Conferences > OFC > 2022 > M2D > M2D.5

High performance thin-film lithium niobate MZ modulator ready for massive production

Heng Li, Quanan Chen, Ye Liu, Yongqian Tang, Qiaoyin Lu, Mingzhi Lu, and Weihua Guo

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Abstract

Through photolithography we fabricated high-performance thin-film lithium niobate modulators on full 4-inch wafers with low VπL, wide bandwidth and low insertion loss. The waveguide loss is one of the lowest among similar work.

© 2022 The Author(s)

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More Like This
Low Vπ silicon-based x-cut thin-film lithium niobate MZ modulators fabricated by photolithography

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