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Conferences > OFC > 2022 > W3D > W3D.5

Ultra-low loss silicon nitride ring modulator with low power PZT actuation for photonic control

Jiawei Wang, Kaikai Liu, Mark W. Harrington, Ryan Q. Rudy, and Daniel J. Blumenthal

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Abstract

A wafer-scale PZT-actuated ultra-low loss, low-power, stress-optic Si3N4 ring modulator is realized with 7 million Q, 0.03 dB/cm loss, 20 nW power consumption and 20 MHz 3-dB bandwidth, is demonstrated to track a laser.

© 2022 The Author(s)

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