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High-resolution Radiation Characterization for an Uniformly Emitted SiNx Nanophotonic Phased Array

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Abstract

With a high-resolution characterization setup, waveguide modes are clearly observed in near-field radiation patterns of SiNx nano-antennas. This phased array has uniform emission throughout the antenna within 3dB bandwidth of 120 nm from 785-905 nm.

© 2023 The Author(s)

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