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A Hybrid Solid-State Beam Scanner for FMCW LiDAR Application

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Abstract

We demonstrate a hybrid solid-state beam scanner based on a Si3N4 switching array. Two-dimensional beam steering with a 14.3°x9.9°field of view and FMCW ranging operation at a distance of 7.4 m are achieved.

© 2023 The Author(s)

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