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World’s First Pure Fabry-Perot Diaphragm Fiber Optic Sensor (DFOS)

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Abstract

A critical test is proposed to determine if a diaphragm fiber optic sensor (DFOS) is interference or intensity based. Using the criterion, the first purely Fabry-Perot DFOS has been designed, fabricated with MEMS technology, and characterized with orders of improvement of signal-to-noise ratio.

© 2006 IEICE

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