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Silicon Photonics Based System-On-Chip Gas Sensor

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Abstract

We design silicon photonics based system-on-chip multi-gas sensor and experimentally demonstrate the temperature insensitive CO2 gas sensing. In the preliminary measurement results, we observe a sensitivity of ~500 ppm based on the optical L-band wavelength light source and on chip all-silicon photodetectors.

© 2018 The Author(s)

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