A highly sensitive fiber-optic microphone based on corrugated MEMS diaphragm with sub-µm thickness

X. Q. Lu; Y. Wu; Y. J. Rao

doi:10.1364/OFS.2018.TuE86

26th International Conference on Optical Fiber Sensors
OSA Technical Digest (Optica Publishing Group, 2018),
paper TuE86
•https://doi.org/10.1364/OFS.2018.TuE86

A highly sensitive fiber-optic microphone based on corrugated MEMS diaphragm with sub-µm thickness

X. Q. Lu, Y. Wu, and Y. J. Rao

Optical Fiber Sensors 2018

Lausanne Switzerland
24–28 September 2018
ISBN: 978-1-943580-50-7

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Poster Session I (TuE)

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X. Q. Lu, Y. Wu, and Y. J. Rao, "A highly sensitive fiber-optic microphone based on corrugated MEMS diaphragm with sub-µm thickness," in 26th International Conference on Optical Fiber Sensors, OSA Technical Digest (Optica Publishing Group, 2018), paper TuE86.

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Abstract

A practical fiber-optic microphone based on corrugated micro-electro-mechanical-systems (MEMS) diaphragm is demonstrated with a minimum detectable pressure of 2.97 μPa/Hz^1/2 at 1 kHz sonic signal, which is 20 times more sensitive than commercial electronic microphone.

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