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Packaged Tapered Fiber and SU-8 Hemispherical Resonator for Thermal Sensing

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Abstract

We report a self-assembled approach to fabricating high quality SU-8 hemispherical resonators by heating SU-8 microfibers deposited on a PDMS substrate. The size of the hemispheres can be well tuned in a range of 5-300 μm by altering the diameter of the SU-8 microfiber. For robust temperature sensing, the evanescently coupled SU-8 resonator and tapered fiber were packaged by polydimethylsiloxane (PDMS) owing to its large coefficients of thermal refraction. With the increase of temperature, a blueshift of the resonance peaks is observed, achieving a maximum sensitivity of 0.116 nm/°C in a temperature range of 25-125°C.

© 2018 The Author(s)

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