Optical Shop Testing of High Quality Surfaces Using a Digital Interferometer

Richard E. Mahany

doi:10.1364/OFT.1980.FFB1

Workshop on Optical Fabrication and Testing
Technical Digest Series (Optica Publishing Group, 1980),
paper FFB1
•https://doi.org/10.1364/OFT.1980.FFB1

Optical Shop Testing of High Quality Surfaces Using a Digital Interferometer

Richard E. Mahany

Optical Fabrication and Testing 1980

Oakland, California United States
4–6 June 1980
ISBN:

From the session
Optical Testing Technology (FFB)

Not Accessible

Your library or personal account may give you access

Get PDF
Email
Share
Get Citation
Copy Citation Text
R. E. Mahany, "Optical Shop Testing of High Quality Surfaces Using a Digital Interferometer," in Workshop on Optical Fabrication and Testing, Technical Digest Series (Optica Publishing Group, 1980), paper FFB1.

Export Citation
- BibTex
- Endnote (RIS)
- HTML
- Plain Text
Citation alert
Save article

Abstract

In order to assure the highest degree of performance in their finished products, manufacturers of photolithographic objectives for the microelectronics industry have found it necessary to employ advanced testing technology in their optical shops. This paper describes several practical uses of a direct phase measuring digital interferometer in a modern optical fabrication facility.

PDF Article

More Like This

Optical Tests Using Fibers, Balls, and Ronchi Gratings

Robert E. Parks
FFA7 Optical Fabrication and Testing (OF&T) 1980

Angular Measurements In Optical Testing

Norman L. Thomas
FFA6 Optical Fabrication and Testing (OF&T) 1980

Testing Forged IR Optics by Holographic Techniques

K.M. Leung, F. Schmit, and R. Anderson
MB9 Optical Fabrication and Testing (OF&T) 1980

Previous Article Next Article