Abstract

The accuracy requirements for interferometric testing of optical components has become increasingly severe in the past few years. There are two primary reasons for this trend. First, fringe scanning interferometers coupled with rapid, accurate digital processing have provided impressive levels of measurement resolution and accuracy. The second driving force is the construction of large systems containing on the order of one hundred surfaces with a transmitted wavefront specification of a fraction of a wavelength.

© 1982 Optical Society of America