Interferometric Lens Testing to λ/40 at λ=0.442μm

Joann Berman; George C. Hunter; Bruce E. Truax

doi:10.1364/OFT.1985.ThCC3

Optical Fabrication and Testing Workshop
Technical Digest Series (Optica Publishing Group, 1985),
paper ThCC3
•https://doi.org/10.1364/OFT.1985.ThCC3

Interferometric Lens Testing to λ/40 at λ=0.442μm

Joann Berman, George C. Hunter, and Bruce E. Truax

Optical Fabrication and Testing 1985

Cherry Hill, New Jersey United States
12–13 June 1985
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Optical Testing (ThCC)

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J. Berman, G. C. Hunter, and B. E. Truax, "Interferometric Lens Testing to λ/40 at λ=0.442μm," in Optical Fabrication and Testing Workshop, Technical Digest Series (Optica Publishing Group, 1985), paper ThCC3.

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Abstract

This paper describes the construction of an interferometer system capable of measuring precision (λ/10 peak-to-valley) microlithographic lenses in transmission. The project required special hardware and Zernike analysis software.

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