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Conferences > OFT > 1986 > ThB > ThB5

Microprofiling Precision Optical Surfaces Using Differential Interference Microscopy

Thomas C. Bristow, Kevork Arackellian, Jay M. Eastman, Jean M. Bennett, and James M. Zavislan

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Abstract

This paper presents a description of the design and testing of a precision surface microprofiler. The instrument's basic design has been reported at previous conferences (References 1 and 2). This paper will emphasize more specific details of the microprofiler's optical and other system components. Emphasis will be made on describing the elements that influence the resolution of the instrument.

© 1986 Optical Society of America

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