In-Process Metrology, Handling, and Cleaning

Gih-Horng Chen

doi:10.1364/OFT.1986.TuA5

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Conferences > OFT > 1986 > TuA > TuA5

Workshop on Optical Fabrication and Testing
(Optica Publishing Group, 1986),
paper TuA5
•https://doi.org/10.1364/OFT.1986.TuA5

In-Process Metrology, Handling, and Cleaning

Gih-Horng Chen

Author Information

Author Affiliations

Gih-Horng Chen

Zygo Corporation, Laurel Brook Road, Middlefield, CT 06455

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G Chen

Optical Fabrication and Testing 1986

Seattle, Washington United States
21–23 October 1986
ISBN:

From the session
Tutorials (TuA)

Open Access

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G. Chen, "In-Process Metrology, Handling, and Cleaning," in Workshop on Optical Fabrication and Testing, (Optica Publishing Group, 1986), paper TuA5.

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- Optical design and fabrication

Abstract

Abstract

An overview will be presented to describe the practice of in-process metrology, handling, and cleaning in optical fabrication. Standard shop practice will be reviewed with emphasis on the recent process development in fabricating state-of-the-art optics.

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Optical Fabrication and Testing 1986
Seattle, Washington United States
21–23 October 1986
ISBN:
From the session Tutorials (TuA)

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