Abstract

The demands of super-smooth surfaces have increased gradually in both advanced science and technology fields, for example, mirrors for ring laser gyros, mirrors and windows for high power lasers, UV optics and X-ray optics. The float polishing technology was invented for finish electronic materials ultrafinely without plastically deformed layer [1-3]. Magnetic heads for VCR need the flat and smooth surfaces of small edge radii without damaged layer at the gape opposing faces. More than one hundred million VCR heads have been produced using the float polishing in Japan.

© 1987 Optical Society of America