Abstract

The Center for Optics Manufacturing Process Science group has produced optical surfaces with little subsurface damage and exceptional figure accuracy using a newly developed deterministic microgrinding process. The process can generate a specular diamond ground optical surface in five minutes. The ability to microgrind high quality optical surfaces quickly, advances the state of the art in optics manufacturing. The results are notably significant, as the samples produced meet the two most critical criteria for deterministic microgrinding: low subsurface damage and high figure accuracy.

© 1992 Optical Society of America