Abstract
The thermomechanical properties of abrasive materials may have a significant effect on the mode of material removal during deterministic microgrinding, as well as on the amount of material removed. For example, Izumitani [1986] has shown that the polishing rate of glass has a strong dependence on the hardness of the abrasive particles via the abrasive particle sintering temperature, and that, for a given glass, there is a polishing agent that maximizes the material removal rate via the dependence of the polishing rate on the creep compliance of the optical polishing agent.
© 1994 Optical Society of America
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