Abstract

An important step in the fabrication of an optical component involves the imparting of a precise contour on the optic, which can be expensive and time consuming. Ion beam figuring is the imparting of a contour on an optical component by removing material through the impingement of a broad beam of accelerated neutral particles, and provides a highly deterministic method for the final precision figuring (or correcting) of optical components with advantages over conventional methods. The high predictability allows the possibility of single step figuring, resulting in significant time and cost savings. And unlike grinding, polishing and lapping, ion figuring is non-contacting and so avoids several problems including: edge roll off effects, tool wear, and loading of the work piece. It has previously been demonstrated that ion figuring is effective for the correcting of large optical components [1][2]. The work discussed here is directed toward the development of the Precision Ion Milling System (PIMS) at NASA's Marshall Space Flight Center, designed for the processing of smaller (8 cm diameter) optical mirrors.

© 1994 Optical Society of America