Add to BibSonomyAbstract
There are two sides to the bright coin of mirror quality: One is specification -- the determination of acceptable level of errors in the shape and finish of the mirror surface -- and the second is testing -- the procedure for measuring those errors to ensure compliance with the specifications.
© 1996 Optical Society of America
PDF ArticleMore Like This
Nonspecular Scattering in EUV Lithography: Determining Specifications for Surface Finish
D. G. Stearns, D. P. Gaines, B. LaFontaine, G. E. Sommargren, D. W. Sweeney, D. R. Kania, and N. M. Ceglio
RMC167 Extreme Ultraviolet Lithography (EUL) 1996
Specification of the Figure and Finish of EUV Mirrors in Terms of Performance Requirements
E. L. Church and P. Z. Takacs
EOS.77 Extreme Ultraviolet Lithography (EUL) 1994
Surface characterization of optics for EUV lithography
D. P. Gaines, K.W. DeLong, S.P. Vernon, D.G. Stearns, D.W. Sweeney, S.L. Baker, D. A. Tichenor, and R. Kestner
JThB.3 Optical Fabrication and Testing (OF&T) 1996