Abstract

The Rapidly Renewable Lap (RRL) uses a textured substrate over which thin films are slumped (Figure 1). The substrate provides the geometry of the lap and a localized texture, depending on the film thickness, properties, and how it is deformed over and adhered to the substrate. Abrasives, added to the film, lap or polish without touching or changing the substrate geometry. Depending on process parameters, the RRL gives brittle or ductile lapping and polishing.

© 1998 Optical Society of America