Abstract

X-ray optics is advancing rapidly and being applied to numerous fields. X-ray mirrors may serve as one of the most important devices giving tremendous influence on the performance of a whole system. X-ray mirrors require for higher precision than any other parts. But the technique which produces such mirrors has yet to be established. In this paper the applications of the ELID grinding technique^1),2), which is known widely as a method for producing high precision ground surfaces in a short period of time, are described for X-ray mirrors.

© 1998 Optical Society of America