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Radical Jet Etching (RJE) - a New Tool for High Rate Figuring of Optical Surfaces

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Abstract

Figuring of optical surfaces is performed using a fluorine containing radical jet yielding removal rates of 10 mm3/min for quartz. By computer numerically controlled dwell-time processing deep aspherics can be machined on very short timescales.

© 2000 Optical Society of America

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