Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Fabrication of a continuous parabolic surface relief array using a silicon-based wet-etch micromachining

Not Accessible

Your library or personal account may give you access

Abstract

A process for fabrication of sub-masters of continuous parabolic surface relief arrays is presented. The device was fabricated employing a silicon-based wet-etch micromachining. Devices with good optical forms are obtained.

© 2000 Optical Society of America

PDF Article
More Like This
Fabrication of optofluidic systems using isotropic wet etched masters in <111> silicon wafer

Liu Neng, Li Ming-yu, Kou Qing-li, and He Jian-jun
SuC5 Asia Optical Fiber Communication and Optoelectronic Exposition and Conference (ACP) 2008

Semiconductor microlenses fabricated by one-step wet etching

Yu-Sik Kim, Jaehoon Kim, and H. Jeon
CTuH6 Conference on Lasers and Electro-Optics (CLEO:S&I) 2000

Fabrication of photonic crystal structure in fluorine-doped silicon dioxide film by dry and wet etching processes

Kenji Kintaka and Junji Nishii
CME3 The European Conference on Lasers and Electro-Optics (CLEO/Europe) 2000

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved