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Quantitative surface characterization using a Nomarski microscope

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Abstract

The use of a Nomarski microscope for the characterization of surface features will be presented. Since a Nomarski microscope measures slope values, the shape of a surface can be followed qualitatively. Besides, a Nomarski microscope can be used to analyze surface roughness in terms of rms value and a distinction between different types of surface roughness is possible. Examples of Nomarski measurements will be shown and discussed.

© 2000 Optical Society of America

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