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ROUGHNESS GAP BETWEEN ATOMIC SURFACES AND SUPER-POLISHED, SUPER-GROUND AND DIAMOND-TURNED SURFACES

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Abstract

We present a novel geometrical model of atomic topography to give a quantitative evaluation of surface roughness. A series of two- and three-dimensional atomic surface roughness equations with sufficiently realistic parameters were developed to permit quantitative comparison with scanning tunneling microscope and atomic force microscope (AFM) experimental results.

© 2000 Optical Society of America

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