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Optica Publishing Group
  • Frontiers in Optics 2004/Laser Science XXII/Diffractive Optics and Micro-Optics/Optical Fabrication and Testing
  • OSA Technical Digest (CD) (Optica Publishing Group, 2004),
  • paper OMC2
  • https://doi.org/10.1364/OFT.2004.OMC2

Selectivity in Polishing of Silicon Dioxide and Nitride Thin Films Using Mixtures of Abrasives

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Dispersions of composite particles consisting of two different abrasives are capable of producing selective material removal rates. The role of surface charges that facilitate the preparation and application of these mixed abrasive systems are discussed.

© 2004 Optical Society of America

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