Advances in non-contacting surface metrology

Ian Lee-Bennett

doi:10.1364/OFT.2004.OTuC1

Frontiers in Optics 2004/Laser Science XXII/Diffractive Optics and Micro-Optics/Optical Fabrication and Testing
OSA Technical Digest (CD) (Optica Publishing Group, 2004),
paper OTuC1
•https://doi.org/10.1364/OFT.2004.OTuC1

Advances in non-contacting surface metrology

Ian Lee-Bennett

Optical Fabrication and Testing 2004

Rochester, New York United States
11–13 October 2004
ISBN: 1-55752-779-2

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I. Lee-Bennett, "Advances in non-contacting surface metrology," in Frontiers in Optics 2004/Laser Science XXII/Diffractive Optics and Micro-Optics/Optical Fabrication and Testing, OSA Technical Digest (CD) (Optica Publishing Group, 2004), paper OTuC1.

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Abstract

This paper describes the recent advances made in scanning white light interferometry. It presents a tool capable of characterizing diamond turning, polishing and super polishing down to sub-Angstrom levels of surface finish.

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