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Optica Publishing Group
  • Frontiers in Optics 2004/Laser Science XXII/Diffractive Optics and Micro-Optics/Optical Fabrication and Testing
  • OSA Technical Digest (CD) (Optica Publishing Group, 2004),
  • paper OTuC4
  • https://doi.org/10.1364/OFT.2004.OTuC4

Identification and compensation of fabrication errors in diamond turning of a large area sinusoidal grid surface

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Abstract

Error components in a sinusoidal grid surface fabricated by diamond turning, which are identified by an evaluation method based on 2D DFT of interference microscope images of the surface, are compensated for through feedback.

© 2004 Optical Society of America

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