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Optica Publishing Group
  • Frontiers in Optics 2008/Laser Science XXIV/Plasmonics and Metamaterials/Optical Fabrication and Testing
  • OSA Technical Digest (CD) (Optica Publishing Group, 2008),
  • paper JWD12
  • https://doi.org/10.1364/OFT.2008.JWD12

Optimization of 4-point Phase-lock PEM Ellipsometry

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Abstract

Only 4-temporal phases are utilized in a photoelastic modulated polarimetry. Based on singular value decomposition, this temporal phase lock PEM ellipsometry can improve the S/N ratio of the polarimetric measurement.

© 2008 Optical Society of America

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